Abstract
Hard carbide coatings such as TiC, HfC, TaC and Cr 7C 3 have found numerous industrial applications. For example, TaC and SiC have been investigated as emissive coatings for X-ray tubes, TiC for ball-bearing and (Hf, Ta)C for space applications. In particular, chemically vapor-deposited TiC coatings have been reported to be extremely useful, because of their good wear resistance and very low coefficient of friction. Also, owing to their high hardness and fine single-phase microstructure, TiC coatings can be polished to yield an extremely smooth surface. In this paper, the morphology and tribological properties of TiC deposited by the plasma-assisted physical vapor deposition technique have been reported. Also, the major functions of the plasma in the film deposition have been discussed.
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