Propagation of Transverse Surface Acoustic Waves in Rotated Y-Cut Quartz Substrates Under Heavy Periodic Metal Electrodes

Abstract

Abstmct-A theory of the propagation of transverse surface acoustic waves on a piezoelectric substrate with heavy periodic metal electrodes on the surface is presented. The mechanical properties of these electrodes are assumed to be nonnegligible. Dispersion relations for waves near the stopband of the periodic electrode array are analyzed. It is found that the mass of the electrodes exerts a considerable effect on the shape and mutual positions of the stopbands for short-circuited and electrically isolated electrodes. The discussion is based on an approximation for the effective surface impedance that relates the amplitudes of the electric and elastic fields observed at the surface of a piezoelectric substrate. The parameters of this approximation are given for rotated Y-cut quartz substrate. The theory presented can readily be generalized to the case of Rayleigh surface waves.