Propagation of Surface Acoustic Pulses Generated by a Femtosecond Laser in Thin Films on Solid Substrates

Abstract

The technique of phase velocity dispersion measurements of surface acoustic waves in a thin film-substrate system was demonstrated. The excitation of surface acoustic waves (SAWs) was quite efficient with femtosecond laser pulses, and the damage of the surface was minimized. The measurements were performed with films of Al deposited on silicon wafers. The errors in the determination of the phase velocity and absorption were analyzed. The temperature changes in the propagation velocity on bare Si wafers were also measured. The data obtained permitted estimation of the accuracy of the temperature determination from measurements with SAW pulses.