Abstract
AbstractThis paper describes the theoretical and experimental results on the propagation of boundary acoustic waves along a ZnO layer between two materials. It was proven theoretically that the boundary acoustic waves propagate in SiO2/ZnO/SiO2, SiO2/ZnO/PYREX and SiO2/ZnO/(Z – X)Si structures. The propagation velocity, electromechanical coupling coefficient K2, and the concentration of energy to the mid‐layer were calculated as a function of the ZnO film thickness. The thermal coefficient of delay time TCD was also calculated for the SiO2/ZnO/SiO2 and SiO2/ZnO/(Z – X)Si structures, showing that a certain ZnO film thickness provides zero TCD. Next, requirements of a glass substrate for propagation of boundary acoustic waves along the ZnO film sandwiched by SiO2 and glass substrate or glass film and glass substrate is discussed. As a result, as the thickness of the ZnO film and the second velocity increase, the boundary acoustic wave has a better chance to exist. Finally, the device with SiO2/ZnO/SiO2 structure was actually fabricated and it was confirmed that the boundary acoustic wave was excited and propagated in the device. If the Rayleigh wave characteristic is taken into account, the experimental and theoretical results agree.
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