Abstract
Firstly, the electron density distribution of inductively coupled plasma (ICP) is measured by laser Thomson scattering (TS) method and the features of the ICP under the same experimental conditions are simulated by finite element method (FEM). The simulated results are in good agreement with the experimental results, which verifies the accuracy of the ICP generation simulation model. Secondly, the propagation characteristics of terahertz wave in ICP are measured by terahertz time domain spectroscopy (THz-TDS) and calculated by FEM according to the electron density distribution of ICP simulated in the first step above. The high consistency between the experimental and simulation results of terahertz wave propagation characteristics in ICP further proves the accuracy of terahertz wave transmission model in plasma and the feasibility of joint simulation with ICP generation simulation model.
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