Abstract
Propagation characteristics of shear-horizontal (SH) plate modes along a water-loaded surface of a rotated Y-cut X-propagation LiNbO3 thin plate are numerically analyzed from the viewpoint of the operation performances of an interdigital transducer. The phase velocity, electromechanical coupling constant, mode conversion efficiency and transducer efficiency are given as a function of the product of frequency and substrate thickness. The velocities obtained from the measured center frequencies of the SH wave devices are in good agreement with the numerically analyzed results. The zeroth-order symmetrical mode has a very high coupling constant of 20% for rotation angles of around 30° under a very low mode conversion value of below 1%.
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