Abstract
Projection masking, thin photoresist layers and interference effects : S. Middlehoek, IBM J. Res. Dev.14, No. 2, March (1970), p. 117
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https://doi.org/10.1016/0026-2714(71)90723-2
Journal: Microelectronics and Reliability | Publication Date: Jan 1, 1971 |
Projection masking, thin photoresist layers and interference effects : S. Middlehoek, IBM J. Res. Dev.14, No. 2, March (1970), p. 117
Join us for a 30 min session where you can share your feedback and ask us any queries you have