Abstract
In this paper, hydrogen-free high sp/sup 3/ content (>90%) diamond-like carbon (DLC) film was prepared by filtered arc deposition (FAD). Its electron field emission behavior and fluorescent displays are tested by using a simple diode structure. Emission current is 0.9 /spl mu/A at electric field as low as 1 V//spl mu/m, and emission current density can be obtained about 5 mA/cm/sup 2/ at electric field as low as 20 V//spl mu/m. Field emission current is stable. Uniform fluorescence display of electron emission from a DLC film under electric field of 12 V//spl mu/m was also obtained. It can be considered that the contribution of the fine electron emission properties results from the smooth surface and high sp/sup 3/ content. A DLC column micro-emitter array was also fabricated by ion beam etching.
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