Abstract
Diamond multi electrode arrays (MEAs) and ultra‐micro electrode array (uMEA) fabricated from boron‐doped nanocrystalline (BNCD) thin‐films, show excellent performances when detecting cell activity in both amperometric and potentiometric applications. Furthermore they are suitable for delivering electrical stimulation to elicit bioelectric events. Results obtained with our previous 9‐channels uMEA for single cells at high spatial resolution, and 16‐channels MEA for multicellular samples, validated the signal quality of diamond MEAs in comparison with competing technologies. The latest progresses are reported in this paper were we describe a new generation of devices with enhanced performances: a 12‐channel uMEA for recordings from a single cell at high spatial resolution, and a 64‐channel MEA to accommodate larger multicellular samples. The technology is based on a 200 μm thin high‐temperature glass with the same thermal expansion coefficient of silicon and a spin‐on seeding method. Preliminary experiments show excellent electrodes activity and a strongly improved transparency.
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