Abstract
The submicron ion beam system has been developed for formation of tens keV H 2 + beam with 0.1 μm width using a duoplasmatron-type ion source and an acceleration lens system. The 33 keV H 2 + beam of 0.28 μm in width was obtained using plasma sheath acceleration in our previous study. In this study, the parallel ion beam extraction was newly introduced using the non-magnetic anode with a hole tapered with Pierce angle to minimize the beam divergence angle in the ion source without the plasma sheath acceleration. The 46 keV H 2 + beam of 0.16 H 2 + in width was obtained by this improvement.
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