Abstract
Acceleration measurement is of great significance due to its extensive applications in military/industrial fields. In recent years, scientists have been pursuing methods to improve the performance of accelerometers, particularly through seeking new sensing mechanisms. Herein, we present a synchronized oscillator-based enhancement approach to realize a fivefold resolution improvement of a microelectromechanical resonant accelerometer. Through the unidirectional electrical coupling method, we achieved synchronization of the sensing oscillator of the microelectromechanical resonant accelerometer and an external reading oscillator, which remarkably enhanced the stability of the oscillation system to 19.4 ppb and the resolution of the accelerometer to 1.91 μg. In addition, the narrow synchronization bandwidth of conventional synchronized oscillators was discussed, and hence, we propose a novel frequency automatic tracking system to expand the synchronization bandwidth from 113 to 1246 Hz, which covers the full acceleration measurement range of ±1 g. For the first time, we utilized a unidirectional electrical synchronization mechanism to improve the resolution of resonant sensors. Our comprehensive scheme provides a general and powerful solution for performance enhancement of any microelectromechanical system (MEMS) resonant sensor, thereby enabling a wide spectrum of applications.
Highlights
1234567890():,; 1234567890():,; 1234567890():,; 1234567890():,; Introduction High-precision microelectromechanical resonant accelerometers have attracted a great deal of interest due to their high sensitivity[1], wide dynamic range[2], and extensive potential applications in military/industrial fields, e.g., inertial navigation[3], seismic detection[4], and consumer electronics[5]
In 2019, we proposed the first microelectromechanical resonant accelerometer based on synchronized doubleended tuning forks (DETFs), whose resolution was found to be improved by a factor of two[21]
We propose a unidirectional electrical coupling method to achieve the synchronization of an microelectromechanical system (MEMS) resonant accelerometer and an external DETF resonator
Summary
High-precision microelectromechanical resonant accelerometers have attracted a great deal of interest due to their high sensitivity[1], wide dynamic range[2], and extensive potential applications in military/industrial fields, e.g., inertial navigation[3], seismic detection[4], and consumer electronics[5]. The resonant accelerometer was placed on the vibration table to sense low-frequency dynamic acceleration signals, while the reading resonator was statically placed and synchronized with the sensing resonator.
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