Programmable resonant and forced mode high-voltage RF generator for dielectric barrier discharge and quadrupole mass filter

Abstract

Dielectric barrier discharge, originally called silent discharge, is the electrical discharge between two electrodes separated by an insulating dielectric barrier. A high-voltage alternating current is required to generate the discharge process. There are two major principles of operation to implement a high-voltage generator: resonant mode and forced mode. While operating in forced mode, the working frequency is forced by the user using internal electronic devices. On the other hand, in resonant mode, the operating frequency is determined by the resonant circuit, which includes the external capacitance, inductance, and resistance of the load. This work shows a flexible circuit based on a real-time digital signal processor and a full H-bridge that combines the two topologies and can be used as a controller for dielectric barrier discharge and a quadrupole mass filter with varying capacitance.