Programmable and Parallel 3D Nanoprinting Using Configured Electric Fields

Abstract

AbstractPrinting metallic nanoscale features remains challenging, but particularly important for making electronic devices. In existing techniques, complex operation, and material parameters significantly limit printing resolution, materials development, and real‐time control. Alternatively, aerosols and ions are synergized to print nanoscale metals, but the ions turn out to be instable, thereby making the printing lose the ability in controlling feature sizes. Herein electrically biased parallel planes are utilized to configure electric fields for programmable and parallel printing of aerosol nanoparticles into high‐purity (>98.5 wt.%) nanoscale features in arrays over large areas (≈mm2). By applying different potentials to three horizontal parallel planes, with the middle plane containing periodic circular perforations, the fields are configured into repeating “funnels” with sizes controllable at both ends. Charged nanoparticles are then subjected to a gas flow orthogonal to the field assembling them to 3D nanoarchitectures. The “funnels” size is predictable and used to control the feature sizes. The printed nanopillars are modulated from 67 to 743 nm in diameters with aspect ratios up to 25 and show excellent mechanical and electrical properties. The programmable and parallel nanoprinting of metallic nanoscale features offers an enabling technology for accelerating the development of next‐generation high‐frequency ultra‐large scale integrated electronic devices.