Abstract
Abstract In white light interferometry, the visibility of the fringes is directly related to the optical path difference between the two interfering beams. With a very short coherence length light source, the zero-order interference fringe may be detected by a simple maximum intensity location while the reference mirror is shifted by a piezoelectric transducer. We use this possibility for high-resolution profilometry. We discuss the maximum sampling distance, which guarantees a correct detection, as a function of the self coherence function of the light source. A practical configuration based on Mirau interferometric microscope objective was built. The experimental results show the nanometric resolution of this technique and its ability to profile surfaces with sharp slopes and deep holes. The application field of either heterodyne or confocal profilometers may be extended by associating them with the proposed method.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
