Abstract
A new profile measurement probe for non-destructive evaluation of high aspect ratio micro structure (HARMS) is proposed. The probe is made of tungsten carbide super hard alloy (WC) and machined by micro EDM. PZT thin films are coated on the probe as an integrated strain sensor. Dedicated measurement machine equipped with this probe is developed and we observed micro holes and gears. In these observations, we obtained very clear images of the sample's detailed shapes, which demonstrate the system's validation for HARMS evaluation.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.