Abstract
In making of the circular cone-shaped tip of a diamond tool having a sub-micron radius by ion sputter-machining, it is very important to investigate effects of the initially pre-finished shape of the diamond tool by diamond abrasive polishing on the finally finished shape by ion sputter-machining, and also develop prediction methods for obtaining the tip radius of a diamond tool by ion sputter-machining. Observation of the two-dimensional profile of a diamond tool tip using scanning electron microscopy showed the ion sputter-machining method to be applicable to this forming process. However, in order to obtain a symmetrical circular tip profile, the diamond tool must be pre-fisnished as much as possible by mechanical polishing as the symmetrical circular tip. The predicted values of tip radii by the straight line approximation method for the tip profile and the direct calculation method for the tip radius coincide with these experimentally obtained values. The profile and surface topography of the 2 μm tip radius diamond tool finished by ion sputter-machining is better than those finished by mechanical polishing
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