Abstract
AbstractLight-weight, large-area and flexible solar cells and modules were developed. Roll-to-roll processes including an improved film deposition process named “Stepping-roll process” are used to fabricate large-area hydrogenated amorphous silicon-based solar cells in succession on plastic film substrates. A unique device having through-hole contacts was developed and applied to simplify the production processes and to generate high voltage using connection in series. Production technologies, such as (1) light-weight and large area module fabrication, (2) plasma condition controlled chemical vapor deposition, (3) low substrate temperature selective reactive sputtering, and (4) large-area uniform transparent conductive oxide film deposition are reviewed.
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