Abstract
The ability to controllably obtain ordered carbon nanotube architectures is important to fundamental characterizations and potential applications of electrical devices. Controlled synthesis involving chemical vapor deposition (CVD) has been an effective strategy to order singlewalled nanotubes (SWNTs) on patterned catalyst. In this paper, Single-walled carbon nanotubes are synthesized by chemical vapor deposition of methane at controlled locations on a silicon substrate. This synthetic approach has allowed individual SWNT wires to be grown from controlled surface sites by catalyst patterning and has led to interconnecting SWNT electrical devices. The combined synthesis and microfabrication technique presented here allows a large number of ohmically contacted nanotube devices with controllable length to be placed on a single substrate.
Highlights
Carbon nanotubes (CNTs) were first discovered by scientists at NEC in 1991 [1]
We have characterized our samples with GEREMI scanning electron microscope (SEM)
In fig 2, we show two SEM micrographs recorded on markers and catalyst islands
Summary
Carbon nanotubes (CNTs) were first discovered by scientists at NEC in 1991 [1] They exhibit exceptional chemical and physical properties that have opened a large number of potential applications: transistor, nanotube interconnects and nanosensor [1,2,3,4,5,6,7,8]. Recently Homma et al [10] demonstrated the fabrication of suspended carbon nanotube networks on 100 nm scale silicon pillar structures by depositing a catalyst film on the silicon substrate. These are effective ways to control the growth of carbon nanotubes. Based on our TEM results, a growth mechanism of CNTs on catalyst islands is described
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