Abstract
A method of producing ultra-fine silicon powder is described. The most probable particle size produced by this method was estimated to be about 30 nm by TEM observation and X-ray diffraction. The powder was produced by an arc plasma method. This method is quite feasible for bulk continuous production of ultra-fine powder. Mechanisms of the production of the powder are also discussed. The principal mechanism for this ultra-fine powder production is attributed to the increase of the partial pressure of nitrogen (or hydrogen) gas by an arc plasma.
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