Abstract
The technological process of the production of silicon nanoparticles from silicon monoxide and methods of the deposition of nanosilicon coatings onto solar cells are developed. The process makes it possible to control the particle dimensions in the range from 2 to 10 nm. The effect of such nanosilicon coatings on the efficiency of solar cells is studied. It is shown that nanosilicon films possess good antireflection and passivation properties and can be successfully used in the technology of the production of solar cells.
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