Abstract
Nanocrystalline titanium nitride (TiN) particles were directly synthesized in an atmospheric microwave plasma torch, using gas‐phase titanium tetrachloride (TiCl4), with N2 and H2 as reactants. The gas‐phase TiCl4 was injected with H2 gas into the microwave plasma‐torch flame generated by N2 swirl gas, and then the dark blue powders were deposited on the inner wall of the quartz tube. The synthesized powder samples were analyzed by scanning electron microscopy (SEM), SEM‐EDX, X‐ray diffractometer (XRD), transmission electron microscopy, and FT‐Raman. The average crystallite sizes of TiN measured from XRD patterns decreased from 15.5 to 11.6 nm, as the flow rate of H2 injected into the microwave plasma torch increased from 0.03 to 0.3 liters per minute.
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