Abstract

The mVINIS ion source has enabled us to obtain multiply charged ion beams from gases as well as from solid materials. The solid substance ion beams were produced by using two techniques: (a) the evaporation of metals by using the inlet system based on a minioven and (b) the metal-ions-from-volatile-compounds method (MIVOC) by using the modified gas inlet system. Great efforts were made in the production of high current stable ion beams of solids with relatively high melting points (over 1000°C). The B3+ ion-beam current of over 300μA was one of the most intensive beams extracted until now. The obtained multiply charged ion-beam spectra of solid substances (B, Fe, and Zn) are presented as well as some of the corresponding experimental results achieved during the modification of polymers, carbon materials, and fullerenes.

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