Abstract
Multiply charged ions of iron are produced from solid material in a 2.45 GHz electron cyclotron resonance (ECR) ion source by using a crucible made from pyrolytic boron–nitride (pBN) with several shields suppressing radiation. The evaporator is set on the geometrical axis. The multicharged ions are extracted from the opposite side of mirror end against the evaporator. Extraction voltage is normally 10 kV. The optimum conditions for production of multicharged iron ions are investigated experimentally. The ion beams can be provided to a newly constructed beam line for the ion irradiation of the substrate installed on the beam line. Multicharged iron ion beams have been utilized to form iron silicides and to enhance light catalytic performance of titanium–dioxide (TiO2) thin films. Formation of iron disilicide (β-FeSi2) has been identified, as well as enhancement of photocatalytic performance of the TiO2 thin films in the visible light region without degradation in the UV light region.
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