Production of multicharged ions and behavior of microwave modes in an electron cyclotron resonance ion source directly excited in a circular cavity resonator

Abstract

Electron cyclotron resonance ion sources (ECRIS) have been widely used for production of high-intensity multicharged ion beams. Making good use of microwave modes is proposed for enhancing the efficiency of ECR for production of multicharged ions (TAIKO II). We can assign the peak position of the electric field of the standing waves to the ECR zone in the directly excited cavity resonator, i.e., the vacuum chamber with the fixed and the mobile plates for selecting and tuning the modes. Periodicity of the extracted multicharged ion currents and plasma parameters is observed as the position of the mobile plate moves. We measure the intensity of the electric field in the ECR plasma by using the insulated semidipole probe and the standing waves are observed. The correlation between the production of multicharged ions and the microwave modes is clarified by measuring the electric field and plasma parameters in the circular cavity resonator.