Abstract
ABSTRACTLaser pyrolysis at short wavelengths is a powerful tool for micron-sized one-step local deposition of insulating, semiconducting and metallic materials from the gas phase. Various structures, e.g. stripes on different substrates, and rods of various lengths and diameters, have been produced. The morphology of the deposited material, the deposition rate, and the dimensions (typically 1-300 μm) of the structures were investigated quantitatively as functions of laser irradiance local temperature, laser focus diameter, scanning velocity, and gas pressure.
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