Abstract
Web transiting process machines have been developed for producing flexible and printed electronics. For establishing a stable roll-to-roll transportation without web defects, the friction coefficient between the web and the transiting roller should be controlled at a low value. We produced the titanium nitride–molybdenum disulfide (TiN–MoS2) composite films by DC magnetron sputtering for improving the frictional characteristics of the transiting roller used in manufacturing process of flexible and printed electronics. The hardness of the TiN–MoS2 films was about 17 GPa at 22% MoS2. The composite films containing 22% MoS2 showed a low friction coefficient of approximately 0.1 at room temperature, which was almost equal to that of diamond-like carbon (DLC) films. In addition, only a small wear was detected on the films after the friction test. The adhesive strength of the composite films was improved by forming the Ti interlayer, and the further reduction of wear was observed.
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