Abstract
A large diameter plasma over 300 mm in diameter is produced by electron cyclotron resonance (ECR) discharges using a cylindrical vacuum chamber of 400 mm in inner diameter. It is found that the plasma uniformity is improved by adding the nitrogen gas to pure Ar plasma. The electron temperature is decreased by adding the nitrogen gas. It is considered that the electron energy is absorbed in the vibrational energy of nitrogen molecules and the electron temperature decreases. Therefore, the adjunction of the nitrogen gas is considered to be effective for producing uniform and low electron temperature plasma.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callSimilar Papers
More From: Thin Solid Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
