Abstract
A large diameter plasma over 300 mm in diameter is produced by electron cyclotron resonance (ECR) discharges using a cylindrical vacuum chamber of 400 mm in inner diameter. It is found that the plasma uniformity is improved by adding the nitrogen gas to pure Ar plasma. The electron temperature is decreased by adding the nitrogen gas. It is considered that the electron energy is absorbed in the vibrational energy of nitrogen molecules and the electron temperature decreases. Therefore, the adjunction of the nitrogen gas is considered to be effective for producing uniform and low electron temperature plasma.
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