Production of 3d metal ion electron cyclotron resonance plasmas and ion beams using volatile compounds

Abstract

The metal ions from volatile compounds method was used to produce metal ion electron cyclotron resonance (ECR) plasmas and metal ion beams. In detail, the production of iron, nickel, and cobalt plasmas and beams on the 14.5 GHz ECR ion source of the TU Dresden is reported using ferrocene, nickelocene, and cobaltocene, respectively. Besides the detection of ion charge state distributions in extracted ion beams with an analyzing magnet first wavelength dispersive x-ray spectra of 3d cobalt metal ions were measured. Thereby, the based on atomic structure calculations analysis of x-ray satellites allows it to get information on the ion charge state spectrum of the ions inside the ECR plasma.