Production and deposition of CN radicals to produce amorphous carbon nitride films with high [N]/([N] + [C]) ratio

Abstract

The dissociative excitation reaction of BrCN with the microwave discharge flow of Ar was studied on the basis of the laser-induced fluorescence (LIF) spectroscopy and electrostatic-probe analysis. The CN( A 2 Π i − X 2 Σ +), 4-0, 5-1, and 7-2 bands were observed by LIF, from which the density of CN( X 2 Σ +) was evaluated as 9.9 × 10 17 m − 3 . The intensities of the LIF spectra of the 3P 1– 3P 2 and 3P 2– 3P 2 transitions of Ar were negligibly weak under the steady-state condition introducing BrCN. Therefore, the contribution of Ar( 3P 2) was negligible to the dissociation process. A kinetic analysis based on the densities of CN( X 2 Σ +) and electrons revealed that the dissociation proceeds almost uniquely via the charge transfer from Ar + followed by the ion–electron recombination and that the dominant quenching process of CN( X 2 Σ +) was reaction with BrCN.