Abstract
Y2O3 thin films were grown onto Si(100) substrates by atomic layer deposition (ALD) using organometallic precursors, viz. tris(cyclopentadienyl)yttrium, Cp3Y, and tris(methylcyclopentadienyl)yttriu...
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have