Processing and Characterization of Nanowire Arrays for Photodetectors

Abstract

We present a fabrication scheme of contacting arrays of vertically standing nanowires (NW) for LEDs (Duan et al. Nature 409:66–69, 2001), photodetectors (Wang et al. Science (NY) 293:1455–1457, 2001) or solar cell applications (Wallentin et al. Science (NY) 339:1057–1060, 2013). Samples were prepared by depositing Au films using nano-imprint lithography (Ma rtensson et al. Nano Lett 4:699–702, 2004) which are used as catalysts for NW growth in a low-pressure metal organic vapour phase epitaxy system where III-V precursors and dopant gases are flown at elevated temperatures which lead to the formation of NWs with different segments (Borgstrom et al. Nano Res 3:264–270, 2010). An insulating SiO2 layer is then deposited and etched from the top segments of the NWs followed by sputtering of a transparent top conducting oxide and opening up 1 × 1 mm2 device areas through a UV lithography step and etching of the top contact from non-device areas. A second UV lithography step was subsequently carried out to open up smaller windows on the ITO squares for bond pad definition, followed by metallization and lift-off; and the substrate is used as back contact. We also report on the electrical and optical properties of near-infrared \(p^{+} - i - n^{+}\) photodetectors/solar cells based on square millimeter ensembles of InP nanowires grown on InP substrates. The study includes a sample series where the p +-segment length was varied between 0 and 250 nm, as well as solar cell samples with 9.3 % efficiency with similar design. The NWs have a complex modulated crystal structure of alternating wurtzite and zincblende segments, a polytypism that depends on dopant type. The electrical data for all samples display excellent rectifying behavior with an ideality factor of about 2 at 300 K. From spectrally resolved photocurrent measurements, we conclude that the photocurrent generation process depends strongly on the p +-segment length. Without p +-segment in the NWs, photogenerated carriers funneled from the substrate into the NWs contribute significantly to the photocurrent. Adding a p +-segment shifts the depletion region up into the i-region of the NWs reducing the substrate contribution to photocurrent while strongly improving the collections of carriers generated in the NWs, in agreement with theoretical modeling (Fig. 48.1).