Process performance of SDS, high pressure hydrides and solid vaporizer feed materials on a 9500×R ion implanter

Abstract

Key process performance characteristics of pure As and P hydrides (AsH/sub 3/ and PH/sub 3/) from low-pressure, zeolite-packed bottles, known as Safe Delivery Sources (SDS), were investigated on a 9500/spl times/R ion implanter. The performance of the SDS source materials was compared to results using hydrides from conventional high-pressure, diluted bottles (HP) and solid vaporizers. The key characteristics tested were; Maximum Beam Currents, Dose Calibration, Depth Profiles, Mass Spectra and (5) Beam Tuning Times. Health and safety issues were extensively investigated throughout the design and implementation of the SDS gas handling system. The SDS source materials were found to be superior to the HP sources for beam current and transfer ratios at all energies. SDS feed materials were superior to solid sources in tuning times (less than 300 sec for all switching combinations), beam-line cleanliness and low-energy beam currents.