Process optimization of nanosecond pulsed packed‐bed discharge plasma for SF6 degradation based on response surface methodology

Abstract

AbstractIn this work, a nanosecond pulsed packed‐bed discharge (PBD) plasma was developed for SF6 degradation under different dilution gases. The discharge form transfers from filamentary discharge to the combination of surface discharge and microdischarge after introducing the packing material regardless of the dilution gas used, and the local electric field strength and SF6 degradation performance are promoted. The mean electron energy and rate coefficient for SF6 excitation in SF6/Ar system are significantly higher than those in SF6/N2 or SF6/air system, which results in higher SF6 degradation efficiency in SF6/Ar system. Moreover, the response surface methodology based on the Box–Behnken design model was constructed to optimize several key process parameters including pulsed voltage, gas flow rate, oxygen content, and relative humidity, as well as assess the contribution of each parameter to SF6 degradation. The proposed optimization model shows a satisfactory correlation between the predicted and the experimental results. The energy yield concerning SF6 degradation in nanosecond pulsed PBD plasma achieves approximately 75.3 g/kWh with nearly complete degradation. This work is expected to provide an efficient and energy‐saving plasma technique for SF6 degradation.