Process optimization and productivity improvement by real-time data collection system

Tuung Luoh Tuung Luoh,Ling-Wuu Yang Ling-Wuu Yang,Yaw-Lin Hwang Yaw-Lin Hwang,C Hsueh,Kuang-Chao Chen Kuang-Chao Chen,Chi-Tung Huang Chi-Tung Huang,Hsueh-Hao Shih Hsueh-Hao Shih,H Chung

doi:10.1109/smtw.2002.1197394

Process optimization and productivity improvement by real-time data collection system

Tuung Luoh Tuung Luoh, Ling-Wuu Yang Ling-Wuu Yang + Show 6 more

https://doi.org/10.1109/smtw.2002.1197394

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Publication Date: Dec 10, 2002

Affiliation: Macronix International (Taiwan)

#In-situ Steam Generation #Real-time Data Collection System + Show 8 more

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Abstract

Factory automation data management (FADM) system is a real-time computer control system. It can record all the process and hardware parameters during processing. The functions in the software include GUI, data communication, digital I/O, D/S control, etc. FADM was adopted in two single-wafer thermal process chambers, in-situ steam generation (ISSG) oxidation and LPCVD poly-silicon (POLYgen), to real-time monitoring the process parameters during processing. Mini-marathon tests for POLYgen and ISSG processes demonstrated that FADM could help engineers to obtain the process stability and its limitation. According to the FADM results, the chambers were retrofitted for process optimization.

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