Abstract
Herein, we present stable and reproducible arc plasma generation from a TiB2 cathode. The process development contains three complimentary features: Use of a Mo cylinder around the TiB2 cathode improves arc ignition and stabilizes the process by keeping the arc spot at the cathode surface. The evolution of the cathode surface during erosion and the process stability is further improved by addition of 1wt% carbon in the cathode, with no resulting change in plasma characteristics (ion energy, ion charge states, macroparticles). Finally, an increased plasma density through use of a separate anode provides the last key point, which together with the other two contributes to highly controlled plasma generation from TiB2 using DC vacuum arc, and complete utilization of the cathode material. The combined results provide a novel and efficient route for synthesis of metal borides.
Highlights
Physical vapor deposition (PVD) is a commonly used method for producing e.g. wear resistant, protective and decorative coatings
With an aim to keep the arc spot on operational surface of the TiB2 cathode, we suggested to surround the cathode by a material which has a higher discharge potential
We show that use of a Mo cylinder around the boride cathode limit the movement of the arc spots to within the rim of the cathode, and improve ignition of the discharge
Summary
Physical vapor deposition (PVD) is a commonly used method for producing e.g. wear resistant, protective and decorative coatings. Routes for improving the process stability, such as addition of carbon, applying a “suitable” magnetic field, using pulsed arc, or working in a reactive atmosphere, have already been suggested.. The route is based on three key features: In the absence of a magnetic field, prevention of the arc spot dying at the cathode edge can be achieved with a Mo cylinder surrounding the TiB2 cathode. The positive effect of the presence of a separate system anode on the process is verified These results are of high importance, providing a path for controlled TiB2 materials synthesis from TiB2 cathodes in DC vacuum arc, and an increased fundamental understanding of plasma generation from metal boride cathodes
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