Abstract

It is important to develop the micro-electro-mechanical system (MEMS) fabrication technology based on polymers. Liquid crystal polymer (LCP) is a suitable substrate for fabricating the flexible MEMS array antenna applied to conforming and bending conditions. This paper presents the metallization process design of the LCP substrate and the patterned process design of the flexible MEMS array antenna. Moreover, by process simulation with the software COVENTOR the process design of the flexible MEMS array antenna has been verified to be feasible.

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