Abstract
Application of the triple-probe method for volume-resolved monitoring of electron density and electron temperature during industrial-scale polymerization plasma process was tested. As a model process, simultaneous deposition of barrier film on the inner wall of six bottles using an asymmetrical r.f. discharge was investigated. The reproducibility of the process was better than 94%. The plasma density differed between particular bottles up to a factor of 2, and this difference increased with pressure. The barrier properties of the film increased with the product of the ion current and square root of the electron temperature
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