Process competition in the micromachining of brittle components

Abstract

In this paper, after reviewing some of the industrial applications of laser micromachining, we focus on the challenging task of dicing a brittle and/or toxic material with random access capability. Results of wire dicing, OD/ID saw dicing, waterjet dicing, Synova Microjet dicing, direct laser dicing and GE liquid-assisted-hollow-fiber laser dicing are compared. Liquid assisted laser dicing showed more advantages in this competition for dicing Cadmium Zinc Telluride (CZT), which is a critical material for detectors. This is a typical case in the industrial applications of laser micromachining—laser technology must compete against other processes. Applications of laser micromachining have expanded quickly in industry in recent years, and we are entering the era of high-speed laser micromachining.In this paper, after reviewing some of the industrial applications of laser micromachining, we focus on the challenging task of dicing a brittle and/or toxic material with random access capability. Results of wire dicing, OD/ID saw dicing, waterjet dicing, Synova Microjet dicing, direct laser dicing and GE liquid-assisted-hollow-fiber laser dicing are compared. Liquid assisted laser dicing showed more advantages in this competition for dicing Cadmium Zinc Telluride (CZT), which is a critical material for detectors. This is a typical case in the industrial applications of laser micromachining—laser technology must compete against other processes. Applications of laser micromachining have expanded quickly in industry in recent years, and we are entering the era of high-speed laser micromachining.