Process and Tool Monitoring

Abstract

Process control, an important element in the success of any manufacturing operation, is especially critical for the complex processes in semiconductor manufacturing. This chapter discusses what should be done in the early phases of process development to have an optimum, manufacturable process. It then describes the process control techniques currently practiced and new methods being incorporated in tools for in situ measurement and control. It is essential that engineers develop process controls during the early development phases of each technology. Cost-effective manufacturing mandates that these controls be imbedded in the process design as the development-to-manufacturing cycle is compressed. Process control requires identification of significant process parameters, and the correlation of each of these to critical product design specifications. One must ensure that the design of the product and process are as insensitive to material variations as possible. Having designed a robust product, one must have control of the process to minimize variability within the process limits as needed for maximum productivity.