Abstract
Certain problems arising in operation of pressure sensors used in rockets and aircrafts are considered. The role and position of thin-film tensoresistive pressure sensors (PRPS) are discussed; these sensors are based on thin-film nano-and microelectromechanical systems. The basic research directions in the field of PRPS are analyzed and presented. The relevance of solving the problem to improve the accuracy and performance characteristics of the sensors and sensing devices (to the level of best-in-class products) is shown; certain ways to solve it are proposed. The basic research directions in the field of PRPS are identified allowing to design the pressure sensors being stable to external influence of nonstationary temperatures and increased vibroaccelerations.
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