Abstract
Advanced material processing using ultra-short pulse laser is ever increasing with miniature of the components due to its capability of high precision control on heat transfer and heat affected zone. The transient growth of heat affected zone is worthy to investigate for nano-scale devices under the application of femtosecond pulse laser. The cost of experiments is high at femtosecond time scale on nano-scale substrates. Hence, the physical model of heat transfer based on finite element method is developed considering non-Fourier effect. The phase lag effect in terms of two relaxation times is considered to study the heat transfer phenomena.
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