Abstract
The reliable characterization of both nanoscaled structures and nanoparticles deposited on semiconductor surfaces using reference-free total-reflection X-ray fluorescence needs an accurate knowledge on the influence of surface structures on X-ray standing wave field (XSW). Artificial structures (pads) of known composition with identical lateral dimensions and different heights in the 10 to 100 nm range were prepared. Their influence on the angular dependence of the XSW has been investigated employing monochromatized synchrotron radiation in the laboratory of the Physikalisch-Technische Bundesanstalt at BESSY II.
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