Probing optimal measurement configuration for optical scatterometry by the multi-objective genetic algorithm

Abstract

Measurement configuration optimization (MCO) is a ubiquitous and important issue in optical scatterometry, whose aim is to probe the optimal combination of measurement conditions, such as wavelength, incidence angle, azimuthal angle, and/or polarization directions, to achieve a higher measurement precision for a given measuring instrument. In this paper, the MCO problem is investigated and formulated as a multi-objective optimization problem, which is then solved by the multi-objective genetic algorithm (MOGA). The case study on the Mueller matrix scatterometry for the measurement of a Si grating verifies the feasibility of the MOGA in handling the MCO problem in optical scatterometry by making a comparison with the Monte Carlo simulations. Experiments performed at the achieved optimal measurement configuration also show good agreement between the measured and calculated best-fit Mueller matrix spectra. The proposed MCO method based on MOGA is expected to provide a more general and practical means to solve the MCO problem in the state-of-the-art optical scatterometry.