Probe diagnostics and numerical simulations of a low pressure argon slender plasma excited by a low frequency discharge

Abstract

In this paper, a slender Ar plasma is excited by a low frequency discharge in a configuration of two parallel cylinder electrodes under a low pressure of 50 Pa, and the plasma features are characterized using an asymmetric double probe. It is found that the electron energy distribution function significantly devitates from the Maxwellian, and the fast groups of electrons may play an important role in preserving the energetic character of the plasma. As the discharge voltage is enhanced, both electron temperature and density increase quickly near the power electrode. A two-dimensional, self-consistent fluid model combined with Monte Carlo simulation is employed to describe the slender plasma. The electron temperature, electron density and discharge current are calculated, and compare favourably with experimental data. In addition, the calculations of electric field present a spatiotemporally asymmetrical distribution, which is correlated with the probe measurements.