Abstract
Time-resolved attenuation of a probe HeNe laser beam by the ablation plume is used to study ablation of polyethyleneterephthalate (PET) and polyimide induced with a KrF excimer laser (248 nm) and a TEA-CO2 laser (9.2 μm). The delay time of the UV ablation in PET with respect to the laser pulse is found to decrease from about 750 ns to 20 ns when the fluente is increased from the detection threshold of about 8 mJ/cm2 to 1 J/cm2. In the case of UV ablation at the cut edges of the polymer sheets a fast signal has been observed that follows the temporal profile of the laser pulse. These data yield important information on the mechanism of the ablation process.
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