Abstract
Based on the principle of the periodic heating method by using cantilever thermocouple nanoprobes, we developed a method and an apparatus to measure the thermal diffusivity of soft materials on a microscale. The contact position of the probe tip with the sample surface was defined by using the phenomenon that the DC component of the thermal electromotive force (EMF) of the probe changes significantly upon contact (i.e., the vertical temperature gradient near the sample surface changes significantly). This contact position was set as the surface reference position where the variation of the thermal contact conductance between the sample surface and the sensor probe is minimized. The phase shift from the micro-heater was measured by the AC component of the probe's thermal EMF and used to accurately determine the thermal diffusivity of micro-sized soft materials. The thermal diffusivity of the microstructured photoresist was determined with a deviation of ±3%.
Published Version
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