Abstract
The use of high plasma density and low gas density, a recent trend in plasma-assisted materials processing, requires a particle simulation method for plasmas and gas flows. The kinetic theory basis of the particle simulation method is first described. Based on this theoretical viewpoint, state-of-the-art probabilistic treatments of collisions are described for electron-molecule, ion-molecule, molecule-molecule, and Coulomb collisions.
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Schedule a callMore From: IEEE transactions on plasma science. IEEE Nuclear and Plasma Sciences Society
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