Abstract
AbstractThe reliability of mlcrofocus x-rad1ogrphy for detecting Internal voids 1n structural ceramic test specimens was statistically evaluated. The micro-focus system was operated in the projection mode using low x-ray photon energies (≤;20 keV) and a 10 μm focal spot. The statistics were developed for Implanted Internal voids 1n green and sintered silicon carbide and silicon nitride test specimens. These statistics were compared with previously-obtained statistics for implanted surface voids in similar specimens. Statistical results are given as probability-of-detection curves at a 95 percent confidence level for voids ranging in size from 20 to 528 μm in diameter.
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