Abstract
Proactive maintenance scheduling is necessary to prevent facility trouble and to ensure high productivity in semiconductor production systems. For such systems, it is usually difficult to determine a proper plan because of complex process flows, which necessitate that jobs often re-enter a facility. This paper presents a method for re-entrant production floor optimization using Lagrangian decomposition coordination. By regarding maintenance as jobs that are limited by a starting and finishing time, the proposed approach produces a schedule that can facilitate proper maintenance. Feasibility is discussed using computer simulation results: the proposed method produces feasible solutions for minimizing overall tardiness problems.
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