Printing pressure optimization in reverse offset printing for micrograting fabrication

Abstract

Among the various printing technologies available, reverse offset printing is the most promising for transferring fine patterns. This study reports the experimental results of interfacial adhesion and elastic deformation of a blanket during the printing process to demonstrate the fabrication of a high-resolution silver thin-film pattern. Additionally, a silicon wafer was used as the printing template, which allowed for the production of a high-resolution template more easily and at a lower cost than conventional glass templates. We successfully patterned line/space = 4 μm/4 μm using the proposed printing technique, and this resolution can be applied to X-ray diffraction gratings according to simulations.